*Equipment model: SCS-04-HD01
*Overall size: approximately
9300mm (L) × 2350mm (W) × 2700mm (H)
*Operating table height: 950 ± 50mm
*Compatible with 12 inch and 8 inch wafers
*Fully automatic operation, foupin foupout
*Dry in - dry out
*Stainless steel SUS316 skeleton, coated with NPP, sturdy and corrosion-resistant
*Industrial computer+PLC control, stable system
*Windows operating system, simple and convenient
*Equipped with automatic addition function
Specification

