Batch cleaning equipment

Fully automatic slot cleaning machines are widely used in

Cleaning in the field of integrated circuits and advanced packaging

Etching, photoresist removal, and other processes.

Compared to traditional cleaning equipment, the level of automation is higher,

Can be used for 4-inch, 6-inch, 8-inch, and 12-inch silicon wafer . It can also be equipped with a megasonic system and pipeline anti-static configuration the device can provide unique protection (SPS system) to silicon wafers in exceptional circumstances

Multiple tanks or single tablets can be provided for chemical drugs

Liquid or pure water, combined with spraying, overflow, and rapid flushing

Washing and other cleaning methods, combined with advanced IPA drying

Method, which can process 25 or 50 pieces simultaneously handle