RCA cleaning equipment

Fully automatic RCA cleaning equipment

1. Applicable fields: semiconductors, liquid crystals, MEMS, etc.;

2. Different sizes can be customized according to needs, and can be applied to silicon wafers 2-12 inches;

3. The equipment is fully enclosed, and the main body is made of imported WPP15 and 10mm thick plates, which is sturdy and durable, double-layer leak-proof and thermally welded, and can work in acid and alkali corrosive environments for a long time;

4. Skeleton: 2t stainless steel SUS304 square tube welded together;

5. Shell: 10T PP porcelain white plate welding and coating;

6. Process tank: modular design, corrosion tank and pure water flushing tank are placed in a unified leak-bearing chassis. The chassis is made of full welding technology to eliminate the risk of machine leakage;

7. Safety guarantee: Complete alarm and protection design, exhaust pressure, liquid level, and drainage are all interlocked by hardware or software, intuitive operation interface, and clear information prompts, ensuring production, process control, and safety. The warning light is placed in a conspicuous place above the machine.

Specification

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RCA cleaning equipment
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